UVTech Systems, Inc.     490 Boston Post Rd    Sudbury, MA 01776
P: (978) 440-7282   F: (978) 440-7099    david.elliott@uvtechsystems.com

XLC-100 Cleaning System
- 200mm Robotic Handling
- Solid State Laser
- Substrate size up to 200mm
- Optional Multiple Gas Mixing Module
   for custom gas recipes

XLC-300 Cleaning System
- Currently in Development 
- Robotic Handling
- Solid State Laser
- Load Port Module, SMIF or FOUP
- Substrate size up to 300mm

LEC-300 Laser Edge Cleaning System
- Currently in Development
- Robotic Handling
- Solid State Laser
- Load Port Module, SMIF or FOUP
- Substrate size up to 300mm