UVTech Systems, Inc.     490 Boston Post Rd    Sudbury, MA 01776
P: (978) 440-7282   F: (978) 440-7099    david.elliott@uvtechsystems.com

Ion Implant   
Crust Removal

Direct Pattern
Imaging

Laser Doping

Low Temperature
Oxidation

Tri-Layer Stack Removal

Current Wet
Chemical Process

UVTech
Dry Laser
Process

Targeted Removal

Additional Applications