UVTech’s mission began in 1994 with an idea to create an environmentally sound cleaning process for the semiconductor industry. The compelling reason for pursuing dry and ‘green’ industrial cleaning is the increasing incidence of cancer which have been positively linked to chemical toxins in our ecosystem. Additionally, the enormous amounts of water that are being consumed by semiconductor fabs around the world (millions of gallons daily) are beginning to cause concern, both ecologically and economically.

Through years of research and development, many applications have been discovered which will lead to huge benefits in the semiconductor cleaning industry. In addition to being dry and 'green', advances in our patented technology will lead to increased semiconductor device yields as the size of circuits get smaller and more delicate. This will, in turn, help drive down consumer costs and allow for future advancements in the chip making processes.

Our mission is to 'open doors' in current cleaning technologies and enable the semiconductor industry to advance without the continually increasing constraints of current technologies.

Example of photoresist
removal from a
200mm wafer

UVTech Systems, Inc.     490 Boston Post Rd    Sudbury, MA 01776
P: (978) 440-7282   F: (978) 440-7099    david.elliott@uvtechsystems.com